PLASUS is a leading manufacturer of plasma monitor and process control systems for plasma applications in R&D as well as production lines.
Our turnkey EMICON systems are most suitable for spectroscopic plasma analysis, optimisation of plasma processes as well as active process control, e.g. reactive sputtering, endpoint detection, quality control and fault detection.
With our latest developments, the HIPIMS module and the layer control module we provide advanced and combined monitoring technology and process control for industrial plasma applications.
PLASUS provides also a variety of in-vacuum optics components with coating protection device and the spectroscopic analysis software SpecLine for easy identification and analysis of spectral data with worldwide unique database for atoms, ions and molecules.
PLASUS GmbH Lechstr. 9 86415 Mering GERMANY www.plasus.de