robeko GmbH & Co. KG
robeko is a supplier of hardware, materials and services for PVD, especially sputter deposition, and PECVD.
In the business unit “Deposition Equipment” we supply our circular microwave plasma sources for PECVD, pretreatment and RIE and are the European distributor for rotatable sputter magnetrons and advanced magnetics produced by Sputtering Components, Inc. as well as other technologically leading companies.
robeko also provides planar and rotatable sputtering targets and bonding services for tribological, decorative and optical applications.
Furthermore we offer in our application labs with three sputter coaters and analytical instruments services for PVD- and PECVD-processes such as layer development, small series production as well as technology transfer from lab scale to industrial production.
robeko GmbH & Co. KG An der Heide 3b 67678 Mehlingen GERMANY www.robeko.de